Research Activities


Fields: Optoelectronics

Key words: Semiconductor laser, Microcavity, Epitaxy and processing, Quantum optics, Nonlinear optics, Optical computing

Background: Optical fiber communications and optical memories are growing to acquire Terabite capacity. On the other hand, silicon based LSI technology has changed the electronic circuit to ultra-multi-function devices. Final goal of research in this group is the integrated optoelectronic devices and systems with the ultra-high speed and high capacity optics or photonics and the multi-functionality of electronics. The research focuses on several key technologies such as microstructure devices, fine processing of semiconductors, novel quantum optical phenomena, and circuit and network topologies.


Subjects:

Spontaneous emission control in microcavities

Various microcavity profiles. They are expected to exhibit the spontaneous emission control, which allows the thresholdless lasing operation and/or ultra-high speed light emitting diodes. The spontaneous emission factor is the key factor; it is inversely proportional to the cavity volume and should be unity for the ideal performance. We experimentally evaluated the factor of 0.07 for 3-micron-diam.disk laser. This value is the largest among so-far reported injection lasers.


Microdisk lasers and photonic integration

This shows the SEM image of fabricated disk laser of 2 microns in diameter. It is the smallest injection laser diodes ever reported. It operated at room temperature with record low threshold of 150 microamperes under cw condition. The lasing wavelength was 1.6 microns. Now we are integrating electrodes and output waveguides to apply this type of device to a novel functional photonic circuit.


Semiconductor photonic crystals

The concept of photonic crystals has been established through pioneering works of Prof. Ohtaka of Chiba University, Prof. Yablonovitch of UCLA, etc. It is a multi-dimensional periodic structure with the period of half wavelength order. It is expected to achieve the efficient control of light emission and propagation. We have formed GaInAsP/InP 2D photonic crystals composed of columns of 200 nm in diameter and 0.6 - 0.8 microns in height. It was formed by EB lithography and CH4-based RIBE or Cl2-based ICP etching. Peculiar transmission spectra and the polarization anisotropy in the PL intensity were observed, which can be explained by the 2D photonic band calculation. The light propagation in photonic crystal waveguides with a sharp bend was also observed at a wavelength range of 1.55 microns. Simulations using the scattering matrix method and the FDTD method showed a large potentiality of an ultra-small lightwave circuit based on this waveguide.


High performance laser diodes for access networks

For access networks, a low cost and high performance LD is demanded. For this purpose, we have proposed a short cavity LD with deep grating DBRs. It is formed by a simple dry etching process, which omits the high reflection coating after the cleavage. A low threshold lasing were obtained in a 1.55-micron-GaInAsP LD with the grating formed by Cl2 ECR-RIBE, Theoretically it allows the threshold less than 1 mA and the single mode operation by a cavity shorter than 50 microns.


Vertical cavity surface emitting lasers for 2D array integration

VCSELs were invented by Prof. Iga of Tokyo Institute of Technology. After the first achievement of the room temperature cw operation of his group in 1988, many groups,e.g., J. Jewell, A. Scherer and colaborators at Bell Labs., had started the research. Even with the long history over 20 years, the technology of long wavelength VCSELs for fiber communication has not been established yet. One of the problems is the large heat against the cw injection. We proposed some heat sinking structures through the FEM simulation of the operating temperature.


High resolution active near field probe based on disk laser

It is difficult to obtain the efficient light output from whispering gallery mode lasers. However, there exists the evanescent field spreading to the outer space. We have proposed and demonstrated a novel active near field probe directly utilizing this evanescent field. The resolution of the probe was estimated theoretically and experimentally to be 1/10 of the lasing wavelength. We expect that it essentially solves problems of conventional metal-coated fiber probes, i.e., the low transmission power, the poor S/N and the difficulty of integration.


All parallel optical neural network

 


Micro-electro-mechanical devices for optical deflection

Scanned optical beam by micro-mirror

 


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